둔감설계법을 이용한 Nb<sub>2</sub>O<sub>5</sub> 박막 제조 조건의 최적화

김재근; 조상필; 민혜경; 최재훈; 황규연; Jaekun Kim; Sangpil Cho; Hyekyong Min; Jaehun Choi; Kyuyeun Hwang

Journal of the Korean Industrial and Engineering Chemistry, Vol.11, No.5, 535-540, August, 2000

Export Citation

둔감설계법을 이용한 Nb₂O₅ 박막 제조 조건의 최적화

The Optimization of Preparation Conditions for Nb₂O₅ Thin Film by the Robust Design

김재근, 조상필, 민혜경^†, 최재훈, 황규연¹

대우전자부품(주) 기술연구소, 전라북도 580-100
¹중앙대학교 화학공학과, 서울 156-756

Jaekun Kim, Sangpil Cho, Hyekyong Min^†, Jaehun Choi, and Kyuyeun Hwang¹

R&D Center, Daewoo Electronic Components Company, 19 Mangjea-Dong, Jungeup-Si, Jeonlabuk-Do, 580-100, Korea
¹Department of Chemical Engineering, Chung-Ang University, 221, Huksuk-Dong, Dongjak-Ku, Seoul 156-756, Korea

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초록

Nb₂O₅ 유전 박막 제조에 있어서, 둔감설계기법(Robust Design Method) 중의 하나인 다구찌(田口)방법을 사용하여 dipping법을 적용한 졸-겔법에 사용된 졸 제조를 위한 조성과 공정 조건을 최적화 하였다. 전극/유전체의 내전압 망대특성을 기준으로 변수들의 기여율을 평가한 결과 가수분해제와 열처리온도의 기여율이 높았으며 첨가시간, 안정화제, 전극코팅횟수, 전극인출속도 등의 영향은 비교적 미미한 정도임을 확인하였다. 제작된 전극은 안정한 정전용량, 내전압, 누설전류 특성을 나타냄으로써 둔감설계법에 기초를 둔 졸-겔 공정을 이용하여 알루미늄콘덴서용 Al/Nb₂O₅ 전극의 적용 가능성이 확인되었다.

In the preparation of Nb₂O₅ thin film, the optimum formation and manufacturing conditions were established by using the Taguchi''s method-one of the Robust Design Methods. Sol-Gel method and dip coating process were applied to embody the thin film. It was found that hydrolysis agent and thermal-treatment temperature have much stronger effect on the Al/Nb₂O₅ electrode characteristics while other factors(mixing time, stabilizing agent, the number of coating process, withdrawing electrode time) have a little effect, according to the results of estimating parameters sensitivity on the basis of withstanding voltage characteristic which is "large-is-better characteristics". Judging from the basic condenser characteristics-capacitance, withstanding voltage, and leakage current of the prepared electrodes it is possible to apply sol-gel process using the robust design method to the new Al/Nb₂O₅ electrode for Al condenser.

Keywords:aluminum electrolytic condenser;niobium oxide;sol-gel process;taguchi method;thin film;robust design;dielectric material

[References]

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Nishino A, "Handbook of Solid State Battery & Capacitors," M.Z.A. Munshi, 627-644, World Scientific
Nishino A, J. Power Sources, 60, 137 (1996)
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일본공개특허공보, 平1-304720
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일본공개특허공보, 平10-32147
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일본공개특허공보, 昭63-306614
"コンデンサ最新技術と材料 '86年版," 84-100, 綜合技術出版 (1985)
Nagata I, "電解液陰極アルミニウム電解コンデンサ," 31-51, 日本蓄電器工業株式會社 (1996)
Shikanai M, Sakairi M, Takahashi H, Seo M, Takahiro K, Nagata S, Yamaguchi S, J. Electrochem. Soc., 144(8), 2756 (1997)
賴高湖, "アルミニウム箔における高誘電體皮膜の形成と電氣特性," 東洋アルミニウム(株), 8 (1997)
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Brinker CJ, "Sol-Gel Science," Academic Press Inc. (1990)
Pierre AC, "Introduction to Sol-Gel Processing," Kluwer Academic Publishers (1998)
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조남희, 강희복, 이전국, 김윤호, 요업학회지, 30(1), 17 (1993)

[Referenced By]

[1] "Aluminum Electrolytic Capacitors - World Market, Technologies & Opportunities," Paumanok Publications, Inc. (1998)

[2] 堀仁孝, NEC技報, 49(10), 68 (1996)

[3] Nishino A, "Handbook of Solid State Battery & Capacitors," M.Z.A. Munshi, 627-644, World Scientific

[4] Nishino A, J. Power Sources, 60, 137 (1996)

[5] von Hippel A, "Dielectric Materials and Application," 3-46, Artech House (1995)

[6] 일본공개특허공보, 平1-304720

[7] 일본공개특허공보, 平4-30510

[8] 일본공개특허공보, 平10-32147

[9] 일본공개특허공보, 昭55-145335

[10] 일본공개특허공보, 昭63-306614

[11] "コンデンサ最新技術と材料 '86年版," 84-100, 綜合技術出版 (1985)

[12] Nagata I, "電解液陰極アルミニウム電解コンデンサ," 31-51, 日本蓄電器工業株式會社 (1996)

[13] Shikanai M, Sakairi M, Takahashi H, Seo M, Takahiro K, Nagata S, Yamaguchi S, J. Electrochem. Soc., 144(8), 2756 (1997)

[14] 賴高湖, "アルミニウム箔における高誘電體皮膜の形成と電氣特性," 東洋アルミニウム(株), 8 (1997)

[15] 朴聖炫, "다구찌 방법과 통계적 공정관리를 중심으로 한 품질공학," 민영사 (1995)

[16] 대우전자(주)품질경영연구소, "다구찌 품질공학 전문가 양성과정," 대우전자 (1996)

[17] Brinker CJ, "Sol-Gel Science," Academic Press Inc. (1990)

[18] Pierre AC, "Introduction to Sol-Gel Processing," Kluwer Academic Publishers (1998)

[19] "Al Electrolytic Capacitor 제품 Catalog," 대우전자부품주식회사 (1999)

[20] Landau LD, Levich VG, Acta Physica Chim. URSS, 17, 41 (1942)

[21] 조남희, 강희복, 이전국, 김윤호, 요업학회지, 30(1), 17 (1993)