In order to recover a low-turbidity polyalkylene glycol (PAG) liquid from silicon slurry waste by sedimentation, temperatures were adjusted, and acetone, ethanol or water was used as a diluent. The experimental results show that the particles in the waste would aggregate and settle readily by using water as a diluent. This is because particle surfaces had lower surface potential value and weaker steric stabilization in PAG-water than in PAG-ethanol or PAG-acetone solutions. Therefore, water is the suggested diluent for recovering a low-turbidity PAG (<100 NTU) by sedimentation. After 50 wt.% water-assisted sedimentation for 21 days, the solid content of the upper liquid reduced to 0.122 g/L, and the turbidity decreased to 44 NTU. The obtained upper liquid was then vacuum-distillated to remove water. The final recovered PAG with 0.37 NTU had similar viscosity and density to the unused PAG and could be reused in the cutting process. (C) 2014 Elsevier B.V. All rights reserved.