Journal of Physical Chemistry A, Vol.118, No.30, 5636-5641, 2014
Electronic Structure of Two Precursors for Nanofabrication: [(CH3)(3)CN](2)W[N(CH3)(2)](2) and Ti(NMe2)(2)(NEt2)(2)
The electronic structures of bis(tert-butylimino)bis(dimethylamino) tungsten and bis(N-ethylethanaminato)bis(N-methylmethanaminato) titanium heteroleptic complexes, which are precursors for atomic layer deposition of metallic nitride on surfaces, have been investigated by HeI and HeII UV photoelectron spectroscopy and DFT/OVGF calculations. We discuss the electronic structures of these two and other related d(0)-type complexes in relation to the mechanism of adsorption and decomposition of metal alkylamide precursors on surfaces.