In this paper, we report on the preparation of Si-Y multi-layer thin films by magnetron sputtering and their application as anode materials of lithium-ion batteries. Scanning electron microscopy (SEM) with energy dispersive X-ray (EDX) and transmission electron microscopy (TEM) have been used to characterize the morphologies and structures of the as-prepared thin films. The framework of the Si-Y thin films is Y-Si-Y-Si multi-layers, including the Si thin film with a thickness of 225 nm and the Y thin film with different thickness (15-37.5 nm). The electrochemical performance of the samples is investigated by charge-discharge measurement, cyclic voltammetry and electrochemical impedance spectra (EIS). Compared with pure Si thin film, the Si-Y thin films with the optimal Y film thickness of about 22.5 nm can deliver a high reversible capacity of 2450 mAh g(-1) under a current density of 0.4 C after 50 cycles, showing superior cycle performance and electrode stability due to the better Li+ diffusion character. This study should shed light on the design and application of Si-Y multi-layer thin films as anode materials of high-capacity lithium-ion batteries. (C) 2012 Elsevier B.V. All rights reserved.