Porous La0.6Sr0.4CoO3-delta thin films were fabricated by pulsed laser deposition for being used as a cathode for micro solid oxide fuel cell applications as MEMS power generators. Symmetrical La0.6Sr0.4CoO3-delta/yttria-stabilized zirconia/La0.6Sr0.4CoO3-delta free-standing membranes were fabricated using silicon as a substrate. A novel large-area membrane design based on grids of doped-silicon slabs was used. Thermomechanical stability of the tri-layer membranes was ensured in the intermediate range of temperatures up to 700 degrees C. In-plane conductivity of ca. 300 S cm(-1) was measured for the cathode within the whole range of application temperatures. Finally, area specific resistance values below 0.3 0 cm(2) were measured for the cathode/electrolyte bi-layer at 700 degrees C in the exact final micro solid oxide fuel cell device configuration, thus presenting La0.6Sr0.4CoO3-delta as a good alternative for fabricating reliable micro solid oxide fuel cells for intermediate temperature applications. (C) 2013 Elsevier B.V. All rights reserved.