We have investigated the effect of substrate temperature on the structural, compositional and electrical properties of cerium fluoride thin films prepared by thermal evaporation method. The structure of cerium fluoride is hexagonal and the growth orientation changes with increase in substrate temperature. The substrate temperature favors the growth of vertical nanorods on the surface of the thin films. The compositional analysis confirms the formation of cerium oxyfluoride, leading to free fluoride ions. Electrical conductivity increases with increasing substrate temperature. (C) 2013 Elsevier B.V. All rights reserved.