Al-induced a-Si crystallization process has been used to prepare polycrystalline Si (pc-Si) thin films on glass substrates. It has been found that the glass/Al/Al2O3/a-Si multilayer could be transformed into the structure of glass/Si/Al2O3/Al via a thermal treatment at 500 degrees C for 5 h. The Si layer in the glass/Si/Al2O3/Al system is in the polycrystalline state and exhibits a high crystallographic quality, a dense and continuous surface morphology, an average grain size of similar to 18 mu m, a similar to 2.6 x 10(19) cm(-3) hole concentration and a similar to 24.2 cm(2)/V s hole mobility. The crystallographic quality and electrical performance of the pc-Si film can be further improved by increasing crystallization time and temperature. The obtained pc-Si material may be a suitable candidate for the solar cells. (C) 2013 Elsevier Ltd. All rights reserved.