화학공학소재연구정보센터
Materials Science Forum, Vol.353-356, 21-24, 2001
Progress in 4H-SiC bulk growth
4H-SiC ingots with diameter up to 35 mm have been grown by the Modified Lely Method with "in situ" etching. The influence of the crystal shape on the cracking of SiC crystals has been investigated. The original source design allowed to maintain an excess of Si above the growing crystal to decrease defect density.