In this study, micropipe filling by sublimation Close Space Technique is reported. The relationship between the off-axis angle from the (0001) and (000 (1) over tilde) basal planes of 6H-SiC substrates toward < 11 (2) over bar0 > direction and the probability of micropipe filling has been investigated. It was established that the probability increased with increasing off-axis angle. At that, the (000 (1) over bar) face showed better characteristic for micropipe filling than the (0001) face. The micropipe filling could not be observed in the case of epitaxial growth on on-axis substrates. On the basis of the obtained results, it is concluded that substrates with off-axis angle toward < 11 (2) over bar0 > direction were important for micropipe filling as the crystal growth proceeded in the step-flow process.