Materials Science Forum, Vol.353-356, 195-198, 2001
Laser crystallization of amorphous SiC thin films on glass
Amorphous silicon carbide thin films deposited by laser ablation were crystallized by an excimer laser. Crystallites in the 40 nm range were observed by TEM. From time resolved reflectivity measurements a melt mediated crystallization process is postulated in contradiction to the equilibrium phase diagram.