화학공학소재연구정보센터
Materials Science Forum, Vol.353-356, 267-270, 2001
Characterization of 2 inch SiC wafers made by the sublimation method
Two inch 6H-SiC wafers have been studied. Examination of these wafers by cross polarizer showed black and white stripes which corresponded to sub-grain boundaries. The creation of these stripes was influenced by thermal expansion, the shape of bulk surface etc. This phenomena was confirmed by XRD. Two areas were identified by XRD analysis where sub-grain boundaries were easily created or not.