화학공학소재연구정보센터
Materials Science Forum, Vol.353-356, 475-478, 2001
Tantalum and tungsten in silicon carbide: Identification and polytype dependence of deep levels
We characterize band gap states of tantalum and tungsten in n-type SIC (polytpes 4H-, 6H-, and 15R) by means of Deep Level Transient Spectroscopy (DLTS). To establish a definite chemical identification, the radioactive tracer isotopes (177)Ta and (178)W were used. Both elements have deep band gap states in the investigated polytypes. A comparison of level energies among the three polytypes confirms the validity of the "Rule of Langer-Heinrich".