The influence of the sputter atmosphere on glass supported magnetron sputtered stainless steel films was investigated using Positron Annihilation Lifetime Spectroscopy (PALS) and Doppler-Broadening Annihilation Radiation (DBAR) as well as Rutherford Backscattering (RDS), Integral Low Energy Electron Mossbauer Spectroscopy (ILEEMS), Atomic Force Microscopy (AFM) and Scanning Electron Microscopy (SEM).