화학공학소재연구정보센터
Materials Science Forum, Vol.389-3, 3-8, 2002
Silicon carbide technology in new era
Present-day Sic technologies for bulk crystal growth, epitaxial growth, processing, and devices are reviewed. To argue about the most urgent issues for power switching devices, the low-channel mobility in 4H-SiC MOSFETs is focused upon and an effort to improve it is discussed.