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Materials Science Forum, Vol.389-3, 3-8, 2002
Silicon carbide technology in new era
Present-day Sic technologies for bulk crystal growth, epitaxial growth, processing, and devices are reviewed. To argue about the most urgent issues for power switching devices, the low-channel mobility in 4H-SiC MOSFETs is focused upon and an effort to improve it is discussed.
Keywords:4H-SiC MOSFETs;bulk growth;channel mobility;device processes;epitaxial growth;SiC technology