Materials Science Forum, Vol.389-3, 147-150, 2002
Full Si wafer conversion into bulk 3C-SiC
We report on new 3C-SiC material obtained by direct conversion of a standard 2-inch Si wafer into SiC. The conversion technique is complex but, after proper optimization, will permit to develop new generations of low cost SiC substrates for electronics and nitride optoelectronics applications.
Keywords:bulk 3C-SiC