화학공학소재연구정보센터
Materials Science Forum, Vol.389-3, 385-390, 2002
Growth-induced structural defects in SiCPVT boules
Extended defects in silicon carbide crystals grown by the Physical Vapor Transport method are reviewed. The morphology, density, and distribution of basal plane dislocations, threading edge dislocation, low angle grain boundaries, and elementary screw dislocations are described. The mechanisms responsible for nucleation and/or multiplication of these defects are discussed.