화학공학소재연구정보센터
Materials Science Forum, Vol.389-3, 407-410, 2002
Characterization of 2in SiC as-grown bulk by SWBXT at SPring-8
Two inch 6H-SiC as grown bulk crystal was characterized by using the facilities SWBXT at SPring-8. Since the SR beam is very high electron energy, the defects in the bulk crystal could be observed without cutting into wafer. We could observe the defects mapping and obtained. Defects are disappeared or organized at changing the growth rate. And small defects, which cannot detect the XRD having low electron energy, were observed.