A novel surface treatment was investigated in this study Dipping 6H-SiC samples in boiling HF solution was performed to obtain clean and ordered surfaces. The surfaces of the samples prepared by dipping in boding HF and HF at room temperature were investigated by using Auger electron spectroscopy (AES), Coaxial impact-collision ion scattering spectroscopy (CAICISS), and X-ray photoelectron spectroscopy (XPS). From these surface analyses, it was found that the boding HF treatment remove contamination composed of carbon and oxygen. The Effects of the boiling HF treatment on Current- Voltage characteristics of Al contacts are discussed.