화학공학소재연구정보센터
Materials Science Forum, Vol.389-3, 1005-1008, 2002
On shallow interface states in n type 4H-SiC metal-oxide-semiconductor structures
We investigate the high density of shallow traps found at the 4H-SiC/SiO2 interface near the SiC conduction band edge by using constant-capacitance/conventionaI deep level transient spectroscopy. We find both fast and slow interface states and we estimate their electron capture cross sections to be less than 10(-16) cm(2) and 10(-19) cm(2) respectively.