Two parallel structures with 2 and 3 DOF in which the conventional bearings are replaced with flexure hinges made of single crystals CuAlNiFe are presented. Measurements have been made to determine the repeatability of the parallel robot with 3 DOF. The accuracy is in the range of 0.5-1.3mum. Investigations have also been made on the kinematic behavior of flexure hinges since they do not behave exactly like conventional rotational joints. The movement of the instantaneous center of rotation of the flexure hinge is reflected in the behavior of the compliant parallel mechanism, which shows deviations to its rigid body model. These deviations are also simulated by means of FEM. Because the hinges are loaded cyclical investigations are made to characterize the fatigue failure behavior of this material in combination with the geometry of the hinges. As a result of the anisotropic properties of the single crystal tests have been made to determine dependencies between the orientation of the hinge relative to the lattice.