The oxidation behavior of both the ternary TiPdNi alloy and that containing the rare earth element Cc was investigated by using XRD, EPMA and Nanoindenter. It has been found that the oxidation scale exhibits different layers. The outmost layer is mainly composed of rutile TiO2 while TiNiO2 and Ti4Pd2O phases exist in the inner scale. The alloying element addition (Cc) in the TiPdNi alloy effectively impedes the outward diffusion of Ti ions and obviously improves the oxidation resistance. The microhardness of the matrix changes significantly after oxidation.