The phase transformation behavior of deformed TiNi film was investigated by the differential scanning calorimeter measurement (DSC). The results showed that the reverse transformation of the deformed TiNi film was elevated to a higher temperature on the first heating, but it returned back to the original temperature on the second heating. However, if the martensite to austenite transformation (M-->A) was interrupted on the first heating and cooling down bellow M-f temperature, the martensitic population of the deformed TiNi film was composed of self-accommodating martensite (M2) and oriented martensite (M1). Then two stage reverse transformations corresponding to M1-->A and M2-->A transformations occurred on the second heating.