화학공학소재연구정보센터
Materials Science Forum, Vol.408-4, 1543-1548, 2002
Texture analysis of ferroelectric thin films on platinised Si-based substrates with a TiO2 layer
Quantitative texture analysis is used for the analysis of calcium modified lead titanate thin films deposited on a platinised Si-based substrate with a TiO2 adhesive layer. The reason to use TiO2 instead of the conventional Ti adhesive layer is that it produces a low Ti diffusion rate through the Pt to the surface. Although this produces high stability, substrates with a Ti adhesive layer are currently used to produce highly oriented films along <111>. It has been suggested a connection between the diffused Ti and the appearance of nucleation sites in the film-substrate interface. In this work, we show that it is also possible to induce this type of preferential orientation on substrates with a TiO2 layer. The mechanisms involved in the development of this texture are discussed. We also studied the effect of recrystallisation treatments on the degree of orientation. The results show that in this case the development of texture seems to be a nucleation-controlled phenomenon, against an orientation produced by the preferential growth in specific crystallographic orientations of the grains. Correlation between texture and physical properties of these ferroelectric thin films is established.