We investigated textures and microstructures of damascene Cu. lines. Through x-ray diffraction, textures of damascene Cu lines varied in width from 0.18 mum to 2 mum were analyzed. All lines had a strong <111> fiber texture, but the deviations from the complete fiber were observed. In the narrow lines with 0.18 mum in width, the central pole spread across the trenches-transverse direction than the trenches-longitudinal direction on (111) pole figure. In the pole figure of 2 gm lines, central pole was observed to be split into two peaks. While the thin film, which has the same sample history as that of the line samples, showed symmetric fiber texture. Transmission Electron Microscope (TEM) microstructure indicates that the higher fraction of bamboo grains attributed to the asymmetrical <111> texture in the narrow lines, while the higher fraction of polygranular clusters the split peak in the wide lines.