화학공학소재연구정보센터
Materials Science Forum, Vol.408-4, 1573-1578, 2002
Oriented growth of LiNbO3 thin films for SAW properties
An original 2-step growth process was developed for the deposition of LiNbO3 thin films onto <111>-Si and <001>-Al2O3 substrates. By combining both the r.f. sputtering and the pyrosol methods, stoichiometric <001>-oriented heterostructures could be achieved. Depositions performed on <111>-Si templates led to fiber textures, characteristic of oriented polycrystalline materials. <001>-Al2O3 substrates allowed the development of hetero-epitaxial layers, built up of two 60degrees-rotated domains. The mechanisms behind the in-plane orientation are discussed.