Nanoindentation, as all depth sensing hardness measurement techniques has different sources of error compared to conventional hardness and microhardness test methods. Surface effects, as roughness of the polished sample, and pile-up and sinking-in effects during the indentation process greatly affect the measured hardness value. Combination of the nanoindentation equipment with atomic force microscopy facilitates the study of these effects, and offers a key procedure also for methodological development in this field.