Some possible ways to increase the thermal stability of nano- and submicrocrystalline (SMC) materials obtained by severe plastic deformation (SPD) at lower temperatures are shown. There are alloying, decomposition of supersaturated solid solution and high temperature large strain deformation. Alloying elements, such as Sc and Mg in Al alloys or Mo, V and N in austenitic steels, usually promote increase of thermal stability because of delay of diffusive mobility, reduction of stacking fault energy and initiation of phase transformations, especially, precipitation of disperse phase. Decomposition of supersaturated solid solution can be initiated during the deformation as in Al-Cu-Mg alloy 2024 and during the subsequent heating as in Al-Mg-Sc alloys in dependence on conditions of its obtaining: fast cooling of a high-temperature phase or dissolution of particles of the second phase during cold SPD. High temperature large strain deformation under high pressure could results in SMC grain structure, for example, 150 nm average grain size in Al-Mg-Sc alloy 01570 after SPD under 6 GPa pressure at 400degreesC. Such structure should be stable at short-term reheats on the same temperatures.