Using a three-dimensional finite element modeling of the shot peening process, the influence of shot peening parameters on surface characteristics, in particular on residual stress distributions, is studied. The finite element procedure simulates multiple shot impacts on a plastically deformable target. The obtained analysis results are evaluated for residual stress profiles using a specially developed method. A systematic variation of shot peening parameters allows to evaluate the influence of shot diameter, velocity, coverage and impact angle on residual stress distributions. Moreover, the influence of the material behavior is analyzed by studying the influence of yield stress and work-hardening rate as well as by comparing combined pure isotropic and pure kinematic work-hardening.