Microsystem technology is one of the key technologies of the current decade. It offers undreamed-of possibilities in different technical and scientific fields like information technology, biomedicine and precision engineering. With the great variety of processable materials, the powder injection molding (PIM) technique provides a good opportunity for the manufacturing of microsized or microstructured parts and components. MicroPIM has some requirements, which are not easy to meet concomitantly. Feedstocks must have a high mechanical strength for deformation free demolding. For good surface quality and complete mold filling of small and complex detailed microstructures, powders with small particle sizes have to be used. To reach a surface roughness of 1-2 microns, which is sometimes about one tenth of the smallest dimensions of the structures, submicron or even nanosized (50-100 nm) powders are necessarry. On the other hand the solids content in the feedstocks should be as high as possible to reach a low and reproducible shrinkage with low tolerances. Results of the investigations regarding feedstock development with advanced metallic and ceramic materials, like 17-4PH stainless steel, hard metals (WC/Co), alumina, zirconium oxide [1], silicon nitride and a Al2O3/TiN composite [2] as well as the development of the appropriate machine tools and the debinding and sintering processes are presented.