Materials Science Forum, Vol.433-4, 265-268, 2002
Investigation of defects in 4H-SiC by synchrotron topography, Raman spectroscopy imaging and photoluminescence spectroscopy imaging
Reflection synchrotron topography, integrated photoluminescence imaging and Raman spectroscopy imaging have been performed on a 4H-SiC slice. The three methods give complementary information on the defects in the crystal. The differences between the observations are discussed.