화학공학소재연구정보센터
Materials Science Forum, Vol.433-4, 277-280, 2002
Characteristics of planar defects in shallow trenches related to the presence of micropipes
The similarities of the trenches related with micropipes observed in 4H-SiC layers formed by sublimation epitaxy are compared with the line-shaped pits observed by optical microscopy in the vicinity of closing micropipes in 4H-SiC epilayers grown by the CVD method. The disturbance of the step-flow along the trenches and the related extended defects are discussed.