Materials Science Forum, Vol.433-4, 329-332, 2002
Infrared optical properties of 3C, 4H and 6H silicon carbide
Dielectric functions for 3C-, 4H- and 6H-silicon carbide in the infrared photon energy region have been obtained using spectroscopic ellipsometry. Using samples with the optic axes both parallel and perpendicular to the sample surface normal, both the ordinary and extra-ordinary dielectric function were probed. Phonon modes and optical anisotropy are shown in the dielectric spectra.