Materials Science Forum, Vol.433-4, 697-700, 2002
Diffusion-welded Al contacts to p-type SiC
The first experimental results on Diffusion Welding (DW) applied to p-type 6H- and 4H-SiC are described. Using the extrapolation method and available measurement apparatus the specific series on-state resistance and current-voltage characteristics of Schottky contacts in comparison with the n-type Schottky contacts were obtained.
Keywords:diffusion welding;I-V characteristics;n-type Schottky contacts;on resistance;p-type Schottky contacts