화학공학소재연구정보센터
Materials Science Forum, Vol.433-4, 741-744, 2002
Performance of silicon carbide microwave MESFETs using a thin p-doped buffer layer
Measurements on a fabricated device using a thin buffer is presented and the implications of epitaxial layer variations on these designs are discussed. Devices with 0.2 mm total gate periphery showed an output power of 3.2W/mm at 3 GHz. Larger 1mm-devices fabricated on the same material, showed 1.8 W total output power (1.8 W/mm).