Micro moulding is a key enabling technology in the developments and applications of micro systems technology. Capability for mass production of microstructures from a wide variety of high-performance plastics is the key requirement for the process. In this paper process capability studies have been carried out for the micro moulding process using two micro gear components. It has been found that process capability indices greater than 1.3 can be achieved for both part weight and part dimensional qualities with the tolerance limits set at a few milligrams or microns.