The main problem for characterization of thin coatings, using the ultramicrohardness tests, is related to the determination of the contributions of the substrate and the film for the measured film hardness. Numerical simulation of the ultramicrohardness test can be a helpful tool for a better understanding of the influence of different parameters that are involved in the ultramicrohardness tests of thin films. in this work, specific three-dimensional numerical simulation software, HAFILM, was used to simulate ultramicrohardness tests in three different pars of materials. To perform this study two Vickers indenters and three different film thicknesses were used, in the simulation.