Silicon carbide (SiC) nanorods and micro-crystals were synthesized with controlled structure through a two-step reaction scheme. Carbon nanotubes (CNTs) were first grown by the thermal decomposition Of C2H2 over a Fe/Co metal catalyst loaded on Si(100) wafer surface. The grown CNTs were then reacted with tetramethylsilane JMS) to form SiC nanorods or micro-crystals. SiC nanorods were observed when CNTs reacted with TMS at 1100 degreesC in an IR induced heating chemical vapor deposition (CVD) reactor, whereas SiC micro-crystals were formed at 1250degreesC in an RF induced heating CVD reactor. Higher temperature and longer time were favorable for the growth of good quality SiC crystals. The blue shift of the PL spectra was observed from the SiC nanorods and SiC micro-crystals. The structural change of CNTs in the growth was discussed in this work.