Materials Science Forum, Vol.457-460, 383-386, 2004
Analysis of threading dislocations in wide-bandgap hexagonal semiconductors by energetic approach
Using the anisotropic elasticity theory, we analyze preferential orientations and stability of threading dislocations in hexagonal AlN and SiC. The effect of growth surface on the orientation of low-mobility dislocations is considered. The theoretical predictions are compared with recent observations on CVD-grown 4H-SiC.