Materials Science Forum, Vol.457-460, 555-560, 2004
Electrical transport properties of n-type 4H and 6H silicon carbide
We present an overview of the existing literature data, related to the electrical properties of n-type 4H and 6H-SiC. The temperature dependence of the free electron density and mobility vs doping level is discussed and described theoretically. We investigate the properties of the highly doped materials (implanted or in situ doping with N-D > 10(18) cm(-3)) in the light of some recent results of the literature.