화학공학소재연구정보센터
Materials Science Forum, Vol.457-460, 685-688, 2004
Impurity conduction observed in Al-doped 6H-SIC
6H-SiC single crystals doped with aluminum acceptors at different concentrations were investigated with admittance spectroscopy and Hall effect. Thermally activated impurity conduction was observed at temperatures below 160K. The activation energy of 17meV was obtained from admittance spectroscopy as well as from temperature-dependent resistivity measurements. The Hall coefficient showed a sign reversal in the temperature range where hopping conduction dominates.