화학공학소재연구정보센터
Materials Science Forum, Vol.457-460, 1173-1176, 2004
A high voltage (1,750V) and high current gain (beta=24.8) 4H-SiC bipolar junction transistor using a thin (12 mu m) drift layer
This paper reports the first, near theoretical limit breakdown voltage (1,750V) 4H-SiC BJTs with both high DC current gain(24.8) and low specific on-resistance (8.4mOmega(.)cm(2) at 50A/cm(2) and 12mOmega(.)cm(2) at 356A/cm(2)) based on a drift layer of only 12mum, doped to 8.5x10(15)cm(-3). The high performance is achieved through the use of an optimum single-step junction termination extension (JTE), Al-free base Ohmic contact and wet-oxygen low-temperature re-oxidation annealing. Detailed processing conditions are reported. Room temperature and high temperature current-voltage characteristics are also reported.