Materials Science Forum, Vol.467-470, 1087-1092, 2004
Grain growth in films with initial 3D microstructure
Grain growth in films with h/(0) = 3.5-7.5, where h is the film thickness and (0) the initial average grain diameter, was studied by means of computer simulation. The growth kinetics during 3D --> 2D microstructure transformation do not obey the parabolic law commonly used for the grain growth description. By the end of the transformation, /h is not grater than 2. The drag effect of thermal grooves also results in /h < 2 to the end of the microstructure transformation.