화학공학소재연구정보센터
Materials Science Forum, Vol.471-472, 473-476, 2004
Research on ultra-precision machining technology for KTP
Potassium Titanium Oxide Phosphate (KTP) is a new nonlinear frequency-conversion crystal. It has chemical stability, high nonlinear coefficient, high damage threshold, easily-polished surface, and a broad transparency range. It is be used in solid green laser with medium and low power widely. The requirement for surface roughness is less than 1nm. In this paper, the removal rate and surface roughness are discussed with different velocity, pressure and size of abrasive powder. In order to satisfy the requirement, new polishing techniques with ultra-precision plane polishing machine (Nanopoli-100), and fine AL(2)O(3), SiO2 powders are proposed in this study. The final surface roughness of the KTP is less than 1nm. The machining process and characteristics are also indicated.