The interfacial adhesion between thin film and substrate is often the predominant factor and chief target in determining the performance and reliability of thin film/substrate system. A new technique of laser scratch testing technique has been presented by the authors of the article to characterize the interfacial adhesion between film and substrate, which synthesizes the advantages of traditional scratching technique and laser measure technique. The failure procedure is studied detailedly in the article. On different failure step of the film/substrate system, there are different characteristics of stress and strain, as well as the characteristic of thermal lensing effect, which can be used as the distinguishing rule of the bonding state of the film/substrate system.