EBSD (Electron Back Scattering Diffraction) technique allows us to determine the crystallographic properties of crystalline materials by recording the so-called Kikuchi-lines from a certain area of the specimen. If the crystal structure is free of defects, these lines have sharp edges, but if the sample contains defects, e.g. dislocations or stacking faults, the lines show a diffuse characteristic with blurred edges. According to this, image quality maps made by scanning the sample surface and calculating the quality of Kikuchi-figures at each pixel, show the deformation state of the material. Austenitic stainless steel samples were subjected to different amount of monotonic tensile loading and different number of tensile-compressive cycles at room temperature. Image quality (IQ) map of each specimen was recorded. It was shown that the average gray-scale value of the maps follow the tendency of deformation. In case of monotonic tension, the effect of grain orientation was seen in the gray scale histogram as a fluctuation of gray scale values, while in case of cyclic deformation the cyclic softening and then hardening of the material can be seen in the IQ-maps.