The oxidation behavior of the equiatomic TiNi alloy was investigated at 600-900 degrees C. The oxidation resistance of the TiNi alloy was better than the pure Ti alloy, but worse than the pure Ni alloy. The oxide scales consisted of TiO2, with and without embedded particles of TiNiO3 and Ni. The subscale matrix phase was (TiNi3+TiNi) at 600 degrees C, TiNi3 at 700 degrees C, (Ni+TiNi3) at 800 degrees C, and Ni at 900 degrees C. Oxidation was mainly governed by the inward diffusion of oxygen, and the outward diffusion of Ti and a bit of Ni. Detailed microstructures and the oxidation mechanism are proposed.