화학공학소재연구정보센터
Materials Science Forum, Vol.475-479, 3693-3696, 2005
Microstructure and optical properties of (Zr-0.8, Sn-0.2)TiO4 thin films grown on Si(100) substrates by a sol-gel process
Amorphous and crystalline (Zr-0.8,Sn-0.2)TiO4 (ZST) thin films deposited on Si(100) substrates have been prepared by a sol-gel process. The crystal structure and surface morphologies of the thin films have been studied by X-ray diffraction and atomic force microscopy. The crystalline ZST films on Si(100) substrata with a (111) orientation The refractive index n and extinction coefficient k of the amorphous and crystalline thin films were obtained by spectroscopy ellipsometry as a function of phone energy in the range from 0.7 to 5.4 eV. The absorption edges for amorphous and crystalline ZST are 3.83 and 3.51 eV of indirect-transition type respectively.