In elastic plastic solids, approaching the sub micron scale, critical experiments indicated significant differences in the mechanical response. Thus, mainly in small volume behavior a length scale issue is introduced with implications on the basic understanding of deformation and fracture processes. The current study is centered on the mechanical response of silicon particles in the range of 20-50 nm on sapphire substrate. Monotonic and cyclic mechanical tests have been performed by contact mechanics methodology at ambient temperature. Mechanical information and visualization assisted by scanning probe microscope-based nano indentation alluded to a model founded on dislocation dynamic effects. This facilitated developments regarding the length scale subject in the light of fatigue concepts and structural integrity aspects.