화학공학소재연구정보센터
Materials Science Forum, Vol.483, 307-310, 2005
[01-15] grown 6H SiC bulk crystals investigated by high energy triple axis x-ray diffraction
A structural characterisation of the first [01-15] grown 6H SiC crystals is presented. They show a different micro domain structure outside the facetted region as compared to conventionally [0001] grown crystals. It is imposed by the reduced rotational symmetry for this direction which favours the activation of a low number of glide systems.