Materials Science Forum, Vol.483, 417-420, 2005
Comparison of electrically and optically determined minority carrier lifetimes in 6H-SiC
Minority carrier (hole) lifetime investigations are conducted on identical 6H-SiC p(+)-n structures by electrical (reverse recovery, open circuit voltage decay) and optical (time-resolved photoluminescence) techniques. The p(+)-n diodes are fabricated by Al implantation. Depending on the particular analysis technique, the lifetime is determined either electrically in different regions of the p(+)-n diode or optically in the n-type 6H-SiC epilayer and results, therefore, in different values ranging from ≈ 10 ns to 2.5 μ s.
Keywords:carrier lifetime;reverse recovery;open circuit voltage decay;time-resolved photoluminescence;DLTS